Junction gate field-effect transistor (jfet), semiconductor device having jfet and method of manufacturing

ABSTRACT

A junction gate field-effect transistor (JFET) includes a substrate, a source region formed in the substrate, a drain region formed in the substrate, a channel region formed in the substrate, and at least one gate region formed in the substrate. The channel region connects the source and drain regions. The at least one gate region is configured to cause a depletion region in one of the source and drain regions.

BACKGROUND

Junction gate field effect transistors (JFET) provide various useful characteristics, such as low noise, fast switching speed, high power handling capability, etc. These characteristics make JFETs a design consideration in various power applications, such as power amplifiers.

BRIEF DESCRIPTION OF THE DRAWINGS

One or more embodiments are illustrated by way of example, and not by limitation, in the figures of the accompanying drawings, wherein elements having the same reference numeral designations represent like elements throughout. The drawings are not to scale, unless otherwise disclosed.

FIG. 1 is a perspective, partially cross-sectional view of an n-channel JFET (NJFET) in accordance with some embodiments.

FIG. 2 is a perspective, partially cross-sectional view of a p-channel JFET (PJFET) in accordance with some embodiments.

FIG. 3A is a circuit diagram of a semiconductor device, and FIG. 3B is a perspective, partially cross-sectional view of the semiconductor device in accordance with some embodiments.

FIG. 4 is a top plan view of a JFET in accordance with some embodiments.

FIG. 5 is a perspective, partially cross-sectional view of a JFET in accordance with some embodiments.

FIG. 6 is a flow chart of a method of manufacturing an NJFET in accordance with some embodiments.

FIGS. 7A-7D are cross-sectional views of an NJFET at various stages during manufacture in accordance with some embodiments.

FIG. 8 is a flow chart of a method of manufacturing a PJFET in accordance with some embodiments.

DETAILED DESCRIPTION

It is to be understood that the following disclosure provides many different embodiments or examples, for implementing different features of various embodiments. Specific examples of components and arrangements are described below to simplify the present disclosure. An inventive concept may; however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. It will be apparent, however, that one or more embodiments may be practiced without these specific details. Like reference numerals in the drawings denote like elements.

In some embodiments, a JFET includes source and drain regions, a channel region connecting the source and drain regions, and a gate region. The gate region is configured to cause a depletion region to develop in one of the source and drain regions in response to a voltage applied to the gate region. This is different from other configurations where the gate region causes a depletion region to develop in the channel region. A JFET in accordance with some embodiments is a vertical JFET with the gate region at least partially co-elevational with the source and drain regions for reducing the JFET thickness. Further, it is possible to integrate the manufacturing process of a JFET in accordance with some embodiments in complementary metal-oxide-semiconductor (CMOS) processes, e.g., for making CMOS circuits on the same device or chip as the JFET.

FIG. 1 is a perspective, partially cross-sectional view of an NJFET 100 in accordance with some embodiments. The NJFET 100 comprises a substrate 110 with a deep n-well (DNW) 112, an n-well (NW) 114 and an isolation region (STI) 116 formed in the substrate 110 which also has an upper surface 118. The NJFET 100 further comprises a channel region 120, a drain region 130, a source region 140 and a gate region 150, all of which are formed in the substrate 110. The perspective, partially cross-sectional view in FIG. 1 illustrates about a half of the NJFET 100. The other half (not shown) of the NJFET 100 is structurally similar to the half shown in FIG. 1.

The substrate 110 has a thickness direction Z, and directions X and Y transverse to each other and also transverse to the thickness direction Z. The substrate 110 comprises an elementary semiconductor, a compound semiconductor, an alloy semiconductor, or combinations thereof. Examples of the elementary semiconductor include, but are not limited to, silicon and germanium. Examples of a compound semiconductor include, but are not limited to, silicon carbide, gallium arsenic, gallium phosphide, indium phosphide, indium arsenide, and indium antimonide. Examples of the alloy semiconductor include, but are not limited to, SiGe, GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, and GaInAsP. Other semiconductor materials including group III, group IV, and group V elements are used in some embodiments. In one or more embodiments, the substrate 110 comprises a semiconductor on insulator (SOI), a doped epitaxial layer, a gradient semiconductor layer, and/or a stacked semiconductor structure with one semiconductor layer (e.g., Si) overlying another semiconductor layer (e.g., Ge) of a different type. In some embodiments, the substrate 110 comprises a p-type doped substrate which is denoted as P-sub in FIG. 1. Examples of p-type dopants in the p-doped substrate 110 include, but are not limited to, boron, gallium, and indium. In at least one embodiment, the substrate 110 comprises a p-type doped silicon substrate.

The deep n-well 112 and the n-well 114 are formed in the substrate 110. The deep n-well 112 and n-well 114 are weakly doped regions with n-type dopants. Examples of n-type dopants in the deep n-well 112 and/or n-well 114 include, but are not limited to, phosphorus and arsenic. The n-well 114 extends from the upper surface 118 of the substrate 110 downwardly in the thickness direction Z of the substrate 110 to contact the deep n-well 112. The deep n-well 112 and n-well 114 together define an n-doped structure that isolates the other components of the NJFET 100 from the p-doped substrate 110 and/or other circuitry formed in/on the substrate 110. The deep n-well 112 promotes electric current flowing along the channel region 120. In at least one embodiment, the deep n-well 112 and/or the n-well 114 is/are omitted. The isolation region 116 extends from the upper surface 118 of the substrate 110 downwardly in the thickness direction Z, and around the source region 140 and gate region 150. The isolation region 116 serves to isolate various regions of the NJFET 100 as described herein.

The channel region 120 is an n-channel having at least one n-type dopant doped therein. The drain region 130 is an n-doped region formed at an upper part of the n-well 114 adjacent the upper surface 118 of the substrate 110. The source region 140 is also an n-doped region formed adjacent the upper surface 118 of the substrate 110, and above the channel region 120. The channel region 120 contacts a lower part of the n-well 114 and the source region 140. The channel region 120 electrically connects the drain region 130 and the source region 140.

The gate region 150 is a p-doped gate disposed above the channel region 120. The gate region 150 extends around the source region 140. In the cross-sectional view in FIG. 1, the gate region 150 includes a first gate region 151 and a second gate region 152 on opposite sides of the source region 140. The first gate region 151 and second gate region 152 have corresponding interfaces 153, 154 with the source region 140. The first gate region 151 and second gate region 152 are isolated from the drain region 130 by the isolation region 116. The drain region 130, the source region 140 and the gate region 150 are at least partially co-elevational with each other in the thickness direction Z.

The NJFET 100 is a normally on device. During a period in which no voltage is applied to the gate region 150, the NJFET 100 is in a fully conductive state with the channel region 120 electrically connecting the drain region 130 and the source region 140. When the NJFET 100 is in the conductive state, electric current is permitted to flow along a current path 155 as indicated by the arrows in FIG. 1. Specifically, the current flows from the source region 140 downwardly in the thickness direction Z to the channel region 120, then flows in a direction X transverse to the thickness direction Z along the channel region 120 to the n-well 114, and then flows upwardly in the thickness direction Z to the drain region 130. By applying a reverse bias voltage to the gate region 150, it is possible to control a width of the current path 155 and, hence, a level of the current flowing from the source region 140 to the drain region 130 via the channel region 120. For the NJFET 100, the reverse bias voltage is a negative voltage. At a sufficiently high level of the reverse bias voltage, the current path 155 is pinched off and the NJFET 100 is switched off.

In particular, during a period in which a reverse bias voltage is applied to the gate region 150, a depletion region is caused to develop in the source region 140 and narrows the width of, or even pinches off, the current path 155. For example, upon application of a reverse bias voltage, depletion regions 157, 158 are developed in the source region 140 above the channel region 120. The depletion regions 157, 158 extend from the corresponding interfaces 153, 154 of the first and second gate regions 151, 152 with the source region 140 toward each other in the direction X transverse to the thickness direction Z of the substrate 110. The depletion regions 157, 158 reduce the width of the current path 155 and limit a level of the current flowing through the NJFET 100. As a level of the reverse bias voltage increases, the depletion regions 157, 158 increasingly extend toward each other and further reduce the width of the current path 155. At a sufficient level of the reverse bias voltage, i.e., a pinch-off voltage, the current path 155 is pinched off and the NJFET 100 is switched off.

In the NJFET 100, the depletion regions are caused to develop in the source region 140, above the channel region 120. This is different from other configurations where a depletion region is caused to develop in the channel region. To cause a depletion region to develop in the channel region, the other configurations include a bottom gate below the channel region, and the depletion region is developed and expanded in the thickness direction of the substrate. The inclusion of a bottom gate below the channel region increases the thickness of the device. To the contrary, a bottom gate is not included in a JFET in accordance with some embodiments, thereby reducing the device thickness.

One or more electrical characteristics of the NJFET 100 are variable in accordance with some embodiments by varying a length LS of the source region 140, i.e., the length between the first gate region 151 and the second gate region 152. For example, the longer the length LS is, the higher the pinch-off voltage will be. By varying or controlling the length LS, the pinch-off voltage will be varied or controlled accordingly. The variation or control (also referred to herein as “scalability”) of the length LS in the direction X in accordance with some embodiments is easier than in the other configurations where a channel depth of the channel region is to be controlled or varied in the thickness direction. As a result, it is possible in some embodiments to design and/or manufacture JFETs with reliable electrical characteristics and/or without a risk of an unacceptably high or low pinch-off voltage.

It is further possible to integrate JFETs in accordance with some embodiments with CMOS processes, as described herein. The integration of JFET manufacture in CMOS processes provides low cost solutions for various power application modules where JFETs are used. Examples of such power application modules include power amplifiers, especially radio frequency (RF) power amplifiers, e.g., for cell phones or similar wireless devices. In some embodiments, the RF performance of the RF power amplifiers is enhanced by using a bulk or high resistance substrate, such as an 8-12 ohmic Si substrate, as the substrate 110.

FIG. 2 is a perspective, partially cross-sectional view of a PJFET 200 in accordance with some embodiments. The PJFET 200 comprises a substrate 210 with p-doped bottom region (P-bottom) 212, an n-well (NW) 213, a p-well (PW) 214, a deep n-well (DNW) 215, and an isolation region (STI) 216 formed in the substrate 210. A section 217 of the substrate 210 is positioned between the n-well 213 and the p-well 214. In some embodiments, the section 217 is another isolation region. The n-well 213, p-well 214, isolation region 216, and substrate section (or isolation region) 217 extend from an upper surface 218 of the substrate 210 downwardly in the thickness direction Z. The PJFET 200 further comprises a channel region 220, a source region 230, a drain region 240 and a gate region 250, all of which are formed in the substrate 110. The perspective, partially cross-sectional view in FIG. 2 illustrates about a half of the PJFET 200. The other half (not shown) of the PJFET 200 is structurally similar to the half shown in FIG. 2.

In some embodiments, the substrate 210 is similar to the substrate 110 of the NJFET 100. For example, the substrate 210 is a p-doped substrate. The p-doped bottom region 212 and the p-well 214 correspond to the deep n-well 112 and the n-well 114 of the NJFET 100. The p-doped bottom region 212 and p-well 214 are weakly doped regions with p-type dopants. The p-well 214 extends from the upper surface 218 of the substrate 210 downwardly in the thickness direction Z to contact the p-doped bottom region 212. The p-doped bottom region 212 promotes electric current flowing along the channel region 220. In at least one embodiment, the p-doped bottom region 212 and/or the p-well 214 is/are omitted. The isolation regions 116, 117 serve to isolate various regions of the PJFET 200 as described herein.

The n-well 213 and deep n-well 215 are weakly doped regions with n-type dopants. The n-well 213 extends from the upper surface 218 of the substrate 210 downwardly in the thickness direction Z to contact the deep n-well 215. The n-well 213 extends around the p-well 214, and is isolated from the p-well 214 by the substrate section (or isolation region) 217. The deep n-well 215 is formed below the p-doped bottom region 212. In one or more embodiments, the deep n-well 215 contacts the p-doped bottom region 212. In at least one embodiment, the deep n-well 215 is spaced from the p-doped bottom region 212. The deep n-well 215 and n-well 213 together define an n-doped structure that isolates the other components of the PJFET 200 from the p-doped substrate 210 and/or other circuitry formed in/on the substrate 210.

The channel region 220, source region 230, drain region 240 and gate region 250 correspond to the channel region 120, drain region 130, source region 140 and gate region 150 of the NJFET 100. The channel region 220, is a p-channel having at least one p-type dopant doped therein. The source region 230 is a p-doped region formed at an upper part of the p-well 214 adjacent the upper surface 218 of the substrate 210. The drain region 240 is also a p-doped region formed adjacent the upper surface 218 of the substrate 210, and above the channel region 220. The channel region 220 contacts a lower part of the p-well 214 and the drain region 240. The channel region 220 electrically connects the source region 230 and the drain region 240.

The gate region 250 is an n-doped gate disposed above the channel region 220. The gate region 250 extends around the drain region 240. In the cross-sectional view in FIG. 2, the gate region 250 includes a first gate region 251 and a second gate region 252 on opposite sides of the drain region 240. The first gate region 251 and second gate region 152 have corresponding interfaces 253, 254 with the drain region 240. The first gate region 251 and second gate region 252 are isolated from the source region 230 by the isolation region 216. The source region 230, the drain region 240 and the gate region 250 are at least partially co-elevational with each other in the thickness direction Z.

The PJFET 200 operates similarly to the NJFET 100. Specifically, during a period in which there is no voltage applied to the gate region 250, the PJFET 200 is in a fully conductive state with the channel region 220 electrically connecting the source region 230 and the drain region 240. When the PJFET 200 is in the conductive state, electric current is permitted to flow along a current path 255 as indicated by the arrows in FIG. 2. Specifically, the current flows from the source region 230 downwardly in the thickness direction Z to the channel region 220, then flows in a direction X transverse to the thickness direction Z along the channel region 220, and then flows upwardly in the thickness direction Z to the drain region 240. During a period in which a reverse bias voltage, i.e., a positive voltage, is applied to the gate region 250, depletion regions 257, 258 are developed in the drain region 240 above the channel region 220. The depletion regions 257, 258 extend from the corresponding interfaces 253, 254 toward each other in the direction X, and reduce the width of the current path 255 and limit a level of the current flowing through the PJFET 200. As a level of the reverse bias voltage increases, the depletion regions 257, 258 increasingly extend toward each other and further reduce the width of the current path 255. At a sufficient level of the reverse bias voltage, i.e., a pinch-off voltage, the current path 255 is pinched off and the PJFET 200 is switched off. One or more effects described with respect to the NJFET 100 are also obtainable in the PJFET 200 in accordance with some embodiments.

FIG. 3A is a circuit diagram of a semiconductor device 300. The semiconductor device 300 includes an NJFET 301 and a PJFET 302. Gate regions of the NJFET 301 and PJFET 302 are connected together, and to an input node IN for receiving an input signal at the input node IN. A drain region of the NJFET 301 and a source region of the PJFET 302 are connected together, and to an output node OUT for outputting an output signal at the output node OUT. A source region of the NJFET 301 is connected to a first voltage terminal VSS to receive a first power supply voltage, e.g., the ground voltage. A drain region of the PJFET 302 is connected to a second voltage terminal VDD to receive a second power supply voltage, e.g., a positive power supply voltage.

FIG. 3B is a perspective, partially cross-sectional view of the semiconductor device 300 in accordance with some embodiments. The NJFET 301 and PJFET 302 of the semiconductor device 300 are formed in the same substrate 310 which is similar to the substrate 110 or substrate 210. The NJFET 301 is configured similar to the NJFET 100, and the PJFET 302 is configured similar to the PJFET 200. The gate regions 150, 250 of the NJFET 301 and PJFET 302 are connected to corresponding to vias 371, 372 embedded in one or more dielectric layers (not shown) formed over the substrate 310. The vias 371, 372 are connected together and to the input node IN by a conductive layer 373. The drain region 130 of the NJFET 301 and the source region 230 of the PJFET 302 are to corresponding to vias 381, 382 embedded in the one or more dielectric layers formed over the substrate 310. The vias 381, 382 are connected together and to the output node OUT by a conductive layer 383. The source region 140 of the NJFET 301 is connected to a corresponding via 391 embedded in the one or more dielectric layers formed over the substrate 310. The via 391 is connected to the ground voltage terminal VSS by a conductive layer 392. The drain region 240 of the PJFET 302 is connected to a corresponding via 393. The via 393 is connected to the positive voltage terminal VDD by a conductive layer 394.

The semiconductor device 300 operates as an inverter that inverts the input signal received at the input node IN, and outputs the inverted signal as the output signal at the output node OUT. The semiconductor device 300 further functions as a power amplifier that amplifies an amplitude of the input signal to a higher level of the positive power supply voltage at the terminal VDD. In accordance with some embodiments, by configuring the NJFET 301 as the NJFET 100 and/or the PJFET 302 as the PJFET 200, one or more effects described herein with respect to the NJFET 100 and/or PJFET 200 are achievable in the semiconductor device 300. One or more further effects, such as low noise, high breakdown voltage, fast switching speed, etc. are also achievable in the semiconductor device 300 in accordance with some embodiments.

FIG. 4 is a top plan view of an NJFET 400 in accordance with some embodiments. The NJFET 400 is formed in a substrate 410 having an isolation region 416. The NJFET 400 comprises a drain region 430, a source region 440, and a gate region 450. In some embodiments, the substrate 410, isolation region 416, drain region 430, source region 440 and gate region 450 correspond to the substrate 110, isolation regions 116, drain region 130, source region 140 and gate region 150 of the NJFET 100. The gate region 450 has first and second gate regions 451, 452 corresponding to the first and second gate regions 151, 152 of the gate region 150. However, unlike the first gate region 151 and second gate region 152 which are connected with each other as best seen in FIG. 1, the first gate region 451 and second gate region 452 are disconnected from each other as best seen in FIG. 4. In some embodiments, the same gate voltage, e.g., a reverse bias voltage, is applied to both the first gate region 451 and second gate region 452 in operation. In at least one embodiment, different gate voltages are applied to the first gate region 451 and second gate region 452 in operation, to vary electrical characteristics of the NJFET 400. In at least one embodiment, one of the first gate region 451 and second gate region 452 is omitted.

Each of the first gate region 451 and second gate region 452 has a gate length LG. In at least one embodiment, the gate length of the first gate region 451 is different from the gate length of the second gate region 452. The drain region 430 has a drain length LD, and the source region 440 has a source length LS. One or more of the gate length LG, the drain length LD, and the source length LS is/are variable or scalable to achieve intended electrical characteristics for the NJFET 400, while remaining in compliance with a plurality of design rules to ensure that the NJFET 400 can be manufactured. The description and effect(s) of the NJFET 400 are also applicable to a PJFET in accordance with some embodiments.

FIG. 5 is a perspective, partially cross-sectional view of an NJFET 500 in accordance with some embodiments. The NJFET 500 is formed in a substrate 510 having an isolation region 516 and an n-well 514. The NJFET 500 comprises a drain region 530, a source region 540, and a gate region 550. In some embodiments, the substrate 510, n-well 514, isolation region 516, drain region 530, source region 540 and gate region 550 correspond to the substrate 110, n-well 114, isolation regions 116, drain region 130, source region 140 and gate region 150 of the NJFET 100. The gate region 550 has first and second gate regions 551, 552 corresponding to the first and second gate regions 151, 152 of the gate region 150.

At least one of the drain region 530 and source region 540 has a corresponding drain or source enhancement layer. The enhancement layer has a dopant of the same type as the channel region 520, and a doping concentration of the dopant higher than in the channel region 520. For example, the drain region 530 has a drain enhancement layer 531 with an n-type dopant, i.e., the same dopant type as the channel region 520. A doping concentration of the n-type dopant in the drain enhancement layer 531 is higher than in the channel region 520. For example, in at least one embodiment, the n-type dopant in the drain enhancement layer 531 has a doping concentration of about 100×10¹⁴ atoms/cm³ and the n-type dopant in the channel region 520 has a doping concentration of about 450×10¹² atoms/cm³. The drain enhancement layer 531 is formed in an upper part of the n-well 514 and at least partially co-elevational with the first and second gate regions 551, 552. In at least one embodiment, the drain enhancement layer 531 contacts the channel region 520. The drain region 530 further comprises a drain contact layer 532 which forms an ohmic or schottky contact 534 with the drain enhancement layer 531.

Similar to the drain region 530, the source region 540 includes a source enhancement layer 541, and a source contact layer 542 forming an ohmic or schottky contact 544 with the source enhancement layer 541. The source enhancement layer 541 has the same dopant type, i.e., n-type, as the channel region 520, with a higher doping concentration. In at least one embodiment, the doping concentration of the n-type dopant in the source enhancement layer 541 is the same as that in the drain enhancement layer 531. In at least one embodiment, the doping concentrations of the n-type dopant in the source enhancement layer 541 and the drain enhancement layer 531 are different. The source enhancement layer 541 is at least partially co-elevational with the first and second gate regions 551, 552, and contacts the channel region 520. In at least one embodiment, the drain enhancement layer 531 or the source enhancement layer 541 is omitted. The gate region 550 also includes a gate contact layer 553 which forms an ohmic or schottky contact 554 with the first and second gate regions 551, 552.

Because the enhancement layers 531 and 541 have higher doping concentrations than the channel region 520, the enhancement layers 531 and 541 have lower resistances than the channel region 520. The lower resistances of the enhancement layers 531 and 541 reduce the ON resistance of the NJFET 500. The ohmic or schottky contacts 534, 544, 554 further improve electrical performance of the gate region 550. The description and effect(s) of the NJFET 500 are also applicable to a PJFET in accordance with some embodiments.

FIG. 6 is a flow chart of a method 600 of manufacturing an NJFET, and FIGS. 7A-7D are cross-sectional views of the NJFET at various stages during the manufacturing method 600, in accordance with some embodiments.

At operation 605 in FIG. 6, a deep n-well and one or more isolation regions are formed in a substrate. For example, as illustrated in FIG. 7A, a deep n-well 712 and isolation regions 716, 719 are formed in a substrate 710. In at least one embodiment, the substrate 710, isolation region 716, and deep n-well 712 correspond to the substrate 510, isolation region 516 and deep n-well 512 of the NJFET 500. The isolation region 716 extends around a portion 713 of the substrate 710 where a source region and a gate region of the NJFET are to be formed. The isolation region 719 extends around the portion 713, the isolation region 716 and a portion 715 of the substrate 710 where a drain region of the NJFET is to be formed. In this aspect, the isolation region 719 is similar to the substrate section (or isolation region) 217 described with respect to FIG. 2.

In some embodiments, the deep n-well 712 is formed in the substrate 710 by depositing a photoresist (not shown) over the substrate 710 and patterning the deposited photoresist to form a mask (not shown) having a pattern of the deep n-well 712. The mask is used in an ion implantation performed to implant an n-type dopant into the substrate 710 to form the deep n-well 712. In at least one embodiment, the ion implantation is controlled by one or more of energy, dose, and implantation angle to implant the n-type dopant sufficiently deep into the substrate 710. The mask is subsequently removed.

In some embodiments, the isolation regions 716 and 719 are formed in the substrate 710 by forming trenches (not shown) in the substrate 710, then filling the trenches with an isolation material, such as silicon oxide. The trenches are formed by in at least one embodiment by lithographic and/or etching processes. The depth and/or width of the isolation regions 716 and 719 are selected according to the design and/or intended electrical characteristics of the NJFET to be manufactured.

At operation 615 in FIG. 6, an n-channel region is formed in the substrate. For example, as illustrated in FIG. 7B, a channel region (NJI) 720 is formed in the section 713 of the substrate 710. In at least one embodiment, the channel region 720 corresponds to the channel region 520 of the NJFET 500. In some embodiments, the channel region 720 is formed by creating a mask and then using the mask in an ion implantation performed to implant an n-type dopant into the substrate 710. The mask for forming the channel region 720 is created in a manner similar to that described with respect to operation 605. The ion implantation for forming the channel region 720 is controlled by one or more of energy, dose, and implantation angle. In at least one embodiment, the doping concentration or doping dose for forming the channel region 720 is higher than that for forming the deep n-well 712.

At operation 625 in FIG. 6, an n-well is formed in the substrate. For example, as illustrated in FIG. 7B, an n-well 714 is formed in the section 715 of the substrate 710. In at least one embodiment, the n-well 714 corresponds to the n-well 514 of the NJFET 500. The n-well 714 has an upper part co-elevational with and confined between the adjacent isolation regions 716, 719. The n-well 714 further has a lower part below the isolation regions 716, 719. The lower part of the n-well 714 contacts the deep n-well 712 and the channel region 720. The lower part of the n-well 714 extends sideways to be partially located under one or both of the isolation regions 716, 719. In some embodiments, the n-well 714 is formed in a manner similar to that described with respect to channel region 720, but with a different mask.

At operation 635 in FIG. 6, source and/or drain enhancement layers is/are formed in the substrate. For example, as illustrated in FIG. 7C, drain and source enhancement layers (NJDS) 731, 741 are formed at locations corresponding to the drain region and the source region of the NJFET to be manufactured. In at least one embodiment, the drain and source enhancement layers 731, 741 correspond to the drain and source enhancement layers 531, 541 of the NJFET 500. The drain enhancement layer 731 is formed over the upper part of the n-well 714 and between the adjacent isolation regions 716, 719. The drain enhancement layer 731 further extends below the isolation regions 716, 719, and has a portion located under one or both of the isolation regions 716, 719. In at least one embodiment, the drain enhancement layer 731 contacts the channel region 720. The source enhancement layer 741 is formed in a middle part of the section 713 and contacts the channel region 720. In some embodiments, the enhancement layers 731, 741 are formed in a manner similar to that described with respect to channel region 720, but with a different mask and with a higher dopant concentration.

At operation 645 in FIG. 6, a gate region is formed in the substrate. For example, as illustrated in FIG. 7D, first and second gate regions 751, 752 are formed p-doped regions in the substrate 710. In at least one embodiment, the first and second gate regions 751, 752 correspond to the first and second gate regions 551, 552 of the NJFET 500. Each of the first and second gate regions 751, 752 contacts the isolation region 716 and the source enhancement layer 741. In some embodiments, the first and second gate regions 751, 752 are formed in a manner similar to that described with respect to channel region 720, but with a different mask and with a p-type dopant.

At operation 655 in FIG. 6, a dielectric layer, such as a resist protective oxide (RPO) layer, is formed over the junction area between the source and gate regions. For example, as illustrated in FIG. 7D, RPO layers 761, 762 are formed over the corresponding junction areas between the first gate region 751 and the source enhancement layer 741, and between the second gate region 752 and the source enhancement layer 741. The RPO layers 761, 762 serve to isolate subsequently formed contact layers from contacting each other. In at least one embodiment, the RPO layer is formed by depositing a dielectric material, such as silicon oxide and/or silicon nitride, over the substrate 710, and etching away the dielectric material outside the junction areas.

At operation 665 in FIG. 6, one or more of drain, source and gate contact layers is/are formed over the corresponding to drain, source and gate regions. For example, as illustrated in FIG. 7D, a drain contact layer 732, a source contact layer 742 and a gate contact layer 753 are formed over the corresponding drain enhancement layer 731, source enhancement layer 741, and first and second gate regions 751, 752. In at least one embodiment, the drain contact layer 732, source contact layer 742 and gate contact layer 753 correspond to the drain contact layer 532, source contact layer 542 and gate contact layer 553 of the NJFET 500. In some embodiments, the drain, source and gate contact layers 732, 742 and 753 are silicide layers in ohmic (or schottky) contact with the corresponding, underlying drain, source and gate regions. Such silicide layers are formed, in at least one embodiment, by depositing a metal, such as Ti, Co, Ni, etc. over the structure previously formed over the substrate 710, annealing the substrate 710 with the structure and the deposited metal thereon to have the metal react with silicon in the drain, source and gate regions, and then removing the unreacted metal. The source contact layer 742 and the gate contact layer 753 are separated from each other by the RPO layers 761, 762. The NJFET is thus obtained.

Further processes are subsequently performed in some embodiments to connect the NJFET with other circuitry. For example, one or more dielectric layers (not shown) are deposited over the substrate 710 with the NJFET formed there on, and contact vias 771, 781, 791 are formed in the one or more dielectric layers to be in electric contact with the corresponding gate, drain and source contact layers 753, 732, 742. In at least one embodiment, the contact vias 771, 781, 791 correspond to the vias 371, 381, 391 described with respect to semiconductor device 300.

It is possible to integrate operations of the method 600 for manufacturing the JFET in accordance with some embodiments in CMOS processes for manufacturing CMOS circuitry on the same substrate (e.g., on the same wafer). Two additional masks and the associated ion implantations are added for forming the channel region and the source and/or drain enhancement layers. Thus, it is possible to manufacture JFETs in accordance with some embodiments by CMOS processes, with insignificant changes to the CMOS processes, thereby obtaining a low cost product (e.g., power amplifier) with one or more advantages of the JFET as described herein.

FIG. 8 is a flow chart of a method 800 of manufacturing a PJFET in accordance with some embodiments.

At operation 805, a deep n-well and one or more isolation regions are formed in a substrate, for example, as described with respect to operation 605.

At operation 815, a p-bottom region and a p-channel are formed in the substrate. For example, a p-bottom region 212 and a p-channel 220 are formed in a substrate 210 as described with respect to the PJFET 200. The p-bottom region and p-channel are formed by creating a mask and then using the mask in an ion implantation performed to implant a p-type dopant into the substrate, in a manner similar to that described with respect to operation 615 except for the dopant type. In at least one embodiment, the p-bottom region and the p-channel are formed by using the same mask. In at least one embodiment, the p-type dopant concentration or dose of the p-bottom region is lower than that of the p-channel.

At operation 825, an n-well and a p-well are formed in the substrate. For example, an n-well 213 and a p-well 214 are formed in the substrate 210 as described with respect to the PJFET 200. In at least one embodiment, the formation of the n-well is similar to operation 625. The formation of the p-well is similar to the formation of the n-well, except a different mask and a p-type dopant are used.

At operation 835, source and/or drain enhancement layers is/are formed in the substrate. For example, source and/or drain enhancement layers similar to the source and/or drain enhancement layers 741, 731 described with respect to operation 635 are formed, using similar mask creating and ion implantation processes, except that a p-type dopant is used.

At operation 845, a gate region is formed in the substrate. For example, gate regions similar to first and second gate regions 751, 752 described with respect to operation 645 are formed, using similar mask creating and ion implantation processes, except that an n-type dopant is used.

At operation 855, a dielectric layer, such as an RPO layer, is formed over the junction area between the drain and gate regions, for example, as described with respect to operation 855.

At operation 865, one or more of drain, source and gate contact layers is/are formed over the corresponding to drain, source and gate regions, for example, as described with respect to operation 865.

The effect(s) of the method 600 is/are also applicable to the method 800 accordance with some embodiments.

The above methods include example operations, but they are not necessarily required to be performed in the order shown. Operations may be added, replaced, changed order, and/or eliminated as appropriate, in accordance with the spirit and scope of embodiments of the disclosure. Embodiments that combine different features and/or different embodiments are within the scope of the disclosure and will be apparent to those of ordinary skill in the art after reviewing this disclosure.

According to some embodiments, a JFET comprises includes a substrate, a source region formed in the substrate, a drain region formed in the substrate, a channel region formed in the substrate, and at least one gate region formed in the substrate. The channel region connects the source and drain regions. The at least one gate region is configured to cause a depletion region in one of the source and drain regions.

According to some embodiments, a semiconductor device comprises a substrate, and at least one JFET formed in the substrate. The at least one JFET comprises source and drain regions formed in the substrate, first and second gate regions formed in the substrate, and a channel region formed in the substrate and below the source and drain regions and the first and second gate regions. The first and second gate regions are at least partially co-elevational with the source and drain regions. One of the source and drain regions is disposed between the first and second gate regions. The channel region connects the source and drain regions.

In a method of manufacturing a JFET in a substrate according to some embodiments, a channel region is formed in the substrate. First and second enhancement layers are formed in the substrate. The first and second enhancement layers extend downwardly from an upper surface of the substrate toward the channel region. Each of the first and second enhancement layers has a dopant of the same type as the channel region. A doping concentration of the dopant in the first and second enhancement layers is higher than in the channel region. A gate region is formed in the substrate. The gate region is at least partially co-elevational with the first and second enhancement layers. The gate region contacts the first enhancement layer and is isolated from the second enhancement layer. One of source and drain contacts is formed over the first enhancement layer and the other of source and drain contacts is formed over the second enhancement layer.

It will be readily seen by one of ordinary skill in the art that one or more of the disclosed embodiments fulfill one or more of the advantages set forth above. After reading the foregoing specification, one of ordinary skill will be able to affect various changes, substitutions of equivalents and various other embodiments as broadly disclosed herein. It is therefore intended that the protection granted hereon be limited only by the definition contained in the appended claims and equivalents thereof. 

1. A junction gate field-effect transistor (JFET), comprising: a substrate; a source region formed in the substrate; a drain region formed in the substrate; a channel region formed in the substrate, the channel region connecting the source and drain regions; and at least one gate region formed in the substrate, the at least one gate region configured to cause a depletion region in one of the source and drain regions.
 2. The JFET of claim 1, wherein the at least one gate region has an interface with the one of the source and drain regions, and the at least one gate region is configured to cause the depletion region to extend from the interface into the one of the source and drain regions, in response to a reverse bias voltage applied to the at least one gate region.
 3. The JFET of claim 2, wherein the at least one gate region is configured to cause the depletion region to extend further into the one of the source and drain regions in a direction transverse to a thickness direction of the substrate, in response to an increase of the reverse bias voltage.
 4. The JFET of claim 1, wherein the at least one gate region is at least partially co-elevational with the one of the source and drain regions, the channel region is below the at least one gate region and the one of the source and drain regions, and the at least one gate region is configured to cause the depletion region to be formed above the channel region.
 5. The JFET of claim 1, wherein the at least one gate region comprises a first gate region and a second gate region, and the one of the source and drain regions is sandwiched between the first and second gate regions.
 6. The JFET of claim 5, wherein the one of the source and drain regions is at least partially co-elevational with the first and second gate regions.
 7. The JFET of claim 5, wherein the first and second gate regions are configured to cause corresponding first and second depletion regions in the one of the source and drain regions, and the first and second depletion regions extend toward each other in a direction transverse to a thickness direction of the substrate.
 8. The JFET of claim 5, wherein the channel region is below the first and second gate regions and the one of the source and drain regions, and the first and second gate regions are configured to cause corresponding first and second depletion regions to be formed in the one of the source and drain regions and above the channel region.
 9. The JFET of claim 1, wherein the JFET is an NJFET, the gate region is a p-doped region, the channel region is an n-doped region, the one of the source and drain regions is the source region, the source region is an n-doped region, the drain region includes an n-well contacting the channel region, and the NJFET further comprises a deep n-well below the channel region, the deep n-well contacting the n-well of the drain region.
 10. The JFET of claim 1, wherein the JFET is a PJFET, the gate region is an n-doped region, the channel region is a p-doped region, the one of the source and drain regions is the drain region, the drain region is a p-doped region, the source region includes a p-well contacting the channel region, and the PJFET further comprises: a p-bottom region below the channel region, the p-bottom region contacting the p-well of the source region, an n-well surrounding the gate region, the source and drain regions, and the channel region, and a deep n-well below the p-bottom region, the deep n-well contacting the n-well.
 11. A semiconductor device, comprising: a substrate; and at least one junction gate field-effect transistor (JFET) formed in the substrate, the at least one JFET comprising: source and drain regions formed in the substrate; first and second gate regions formed in the substrate, the first and second gate regions at least partially co-elevational with the source and drain regions, one of the source and drain regions disposed between the first and second gate regions; and a channel region formed in the substrate and below the source and drain regions and the first and second gate regions, the channel region connecting the source and drain regions.
 12. The semiconductor device of claim 11, wherein each of the source and drain regions includes an enhancement layer having a dopant of the same type as the channel region, a doping concentration of the dopant in the enhancement layer higher than in the channel region.
 13. The semiconductor device of claim 12, wherein the enhancement layer of each of the source and drain regions is at least partially co-elevational with the first and second gate regions.
 14. The semiconductor device of claim 12, wherein the other of the source and drain regions includes a doped well, the doped well having an upper part and a bottom part, the bottom part contacting the channel region, the upper part at least partially co-elevational with the first and second gate regions and the one of the source and drain regions, and the enhancement layer of the other of the source and drain regions is formed in the upper part of the doped well.
 15. The semiconductor device of claim 11, wherein the at least one JFET comprises an NJFET and a PJFET, the gate region of the NJFET contacts the gate region of the PJFET, and the source region of the PJFET contacts the drain region of the NJFET.
 16. The semiconductor device of claim 11, wherein the semiconductor device is a power amplifier. 17-20. (canceled)
 21. A semiconductor device, comprising: a substrate; and a transistor formed in the substrate, the transistor comprising a gate region, source and drain regions, and a channel region connecting the source and drain regions, wherein, in a plan view of the substrate, one of the source and drain regions extends around the gate region and the other of the source and drain regions.
 22. The semiconductor device of claim 21, wherein, in the plan view of the substrate, the gate region extends around the other of the source and drain regions.
 23. The semiconductor device of claim 21, wherein the channel region is arranged below the gate region and the source and drain regions.
 24. The semiconductor device of claim 23, wherein the one of the source and drain regions includes a first well contacting the channel region, and the transistor further comprises a second well below the channel region, the second well contacting the first well, the first and second wells having a same type of dopant. 